Helium desorption from cavities induced by high energy 3He and 4He implantation in silicon
S. Godey, E. Ntsoenzok, T. Sauvage, A. van Veen, F. Labohm, M.F. Beaufort, J.F. BarbotVolume:
73
Année:
2000
Langue:
english
Pages:
6
DOI:
10.1016/s0921-5107(99)00433-x
Fichier:
PDF, 325 KB
english, 2000