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Characterization of Si(1 1 1) crystals implanted with Sb+ ions and annealed by rapid thermal processing
R. Labbani, R. Halimi, T. Laoui, A. Vantomme, B. Pipeleers, G. RoebbenVolume:
102
Année:
2003
Langue:
english
Pages:
8
DOI:
10.1016/s0921-5107(02)00630-x
Fichier:
PDF, 458 KB
english, 2003