
Range of ion-implanted rare earth elements in Si and SiO2
L. Palmetshofer, M. Gritsch, G. HoblerVolume:
81
Année:
2001
Langue:
english
Pages:
3
DOI:
10.1016/s0921-5107(00)00742-x
Fichier:
PDF, 99 KB
english, 2001