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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - Hexafluoroalcohol (HFA) containing molecular resist materials for high-resolution lithographic applications
De Silva, Anuja, Allen, Robert D., Somervell, Mark H., Sundberg, Linda K., Sooriyakumaran, Ratnam, Bozano, Luisa, Breyta, Greg, Hinsberg, William D., Fujiwara, MasakiVolume:
7972
Année:
2011
Langue:
english
DOI:
10.1117/12.881735
Fichier:
PDF, 803 KB
english, 2011