Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
Ito, So, Chen, Yuan-Liu, Shimizu, Yuki, Kikuchi, Hirotaka, Gao, Wei, Takahashi, Kazuhiko, Kanayama, Toshihiko, Arakawa, Kunmei, Hayashi, AtsushiVolume:
43
Langue:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2015.09.016
Date:
January, 2016
Fichier:
PDF, 933 KB
english, 2016