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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Fabrication of counter electrodes for scanning atomic probe
Campitelli, Andrew, Ziad, Hocine, Rogge, Frank, Vandervorst, Wilfried, Baert, Christiaan, Huang, Min, Cerezo, Alfred, Smith, James H., Karam, Jean MichelVolume:
3874
Année:
1999
Langue:
english
DOI:
10.1117/12.361214
Fichier:
PDF, 1.24 MB
english, 1999