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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Failure analysis of surface-micromachined microengines
Peterson, Kenneth A., Tangyunyong, Paiboon, Pimentel, Alejandro A., Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Année:
1998
Langue:
english
DOI:
10.1117/12.324056
Fichier:
PDF, 1.93 MB
english, 1998