[IEEE IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS'99) - Kyongju, South Korea (17-21 Oct. 1999)] Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human and Environment Friendly Robots with High Intelligence and Emotional Quotients (Cat. No.99CH36289) - Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators