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Finite element calculations and fabrication of cantilever sensors for nanoscale detection
J.-H. Fabian, L. Scandella, H. Fuhrmann, R. Berger, T. Mezzacasa, Ch. Musil, J. Gobrecht, E. MeyerVolume:
82
Année:
2000
Langue:
english
Pages:
9
DOI:
10.1016/s0304-3991(99)00121-7
Fichier:
PDF, 784 KB
english, 2000