Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer
Amarasinghe, Ranjith, Dao, Dzung Viet, Toriyama, Toshiyuki, Sugiyama, SusumuVolume:
15
Langue:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/15/6/022
Date:
December, 2006
Fichier:
PDF, 961 KB
english, 2006