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SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Strong narrowband peak at 13.5-nm generated in a cavity-confined tin plasma
Aota, Tatsuya, Yashiro, Hidehiko, Ueno, Yoshifumi, Tomie, Toshihisa, Engelstad, Roxann L.Volume:
5037
Année:
2003
Langue:
english
DOI:
10.1117/12.482631
Fichier:
PDF, 422 KB
english, 2003