Pore size evaluation of mesoporous organosilicate films by non-destructive X-ray reflectivity methods
Chien, Yun-San, Yeh, Yu-Shan, Chen, Yen-Song, Leu, Jih-Perng, Fu, Wei-EnVolume:
54
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.06FK03
Date:
June, 2015
Fichier:
PDF, 589 KB
english, 2015