Comparison of B2O3 and BN deposited by atomic layer deposition for forming ultrashallow dopant regions by solid state diffusion
Consiglio, Steven, Clark, Robert D., O'Meara, David, Wajda, Cory S., Tapily, Kandabara, Leusink, Gert J.Volume:
34
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4928705
Date:
January, 2016
Fichier:
PDF, 2.09 MB
english, 2016