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70 cm radio frequency hollow cathode plasma source for modification of foils and membranes
D. Korzec, M. Mildner, F. Hillemann, J. EngemannVolume:
97
Année:
1997
Langue:
english
Pages:
9
DOI:
10.1016/s0257-8972(97)00324-1
Fichier:
PDF, 332 KB
english, 1997