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Multi-jet hollow cathode discharge for remote polymer deposition
D. Korzec, J. Engemann, M. Mildner, K.-P. Ningel, O. Borgmeier, D. TheirichVolume:
93
Année:
1997
Langue:
english
Pages:
6
DOI:
10.1016/s0257-8972(97)00022-4
Fichier:
PDF, 641 KB
english, 1997