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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - Application of a micromachined translatory actuator to an optical FTIR spectrometer
Kenda, Andreas, Drabe, Christian, Schenk, Harald, Frank, Albert, Lenzhofer, Martin, Scherf, Werner, Ürey, Hakan, El-Fatatry, AymanVolume:
6186
Année:
2006
Langue:
english
DOI:
10.1117/12.662008
Fichier:
PDF, 1.23 MB
english, 2006