[IEEE 2015 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2015.4.19-2015.4.23)] 2015 IEEE International Reliability Physics Symposium - Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics on AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
Wu, Tian-Li, Marcon, Denis, De Jaeger, Brice, Van Hove, Marleen, Bakeroot, Benoit, Stoffels, Steve, Groeseneken, Guido, Decoutere, Stefaan, Roelofs, RobinAnnée:
2015
Langue:
english
DOI:
10.1109/IRPS.2015.7112769
Fichier:
PDF, 568 KB
english, 2015