SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Micro-Optics 2014 - Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications
Thienpont, Hugo, Mohr, Jürgen, Zappe, Hans, Nakajima, Hirochika, Abada, S., Reig, B., Daran, E., Doucet, JB, Camps, T., Charlot, S., Bardinal, V.Volume:
9130
Année:
2014
Langue:
english
DOI:
10.1117/12.2052451
Fichier:
PDF, 260 KB
english, 2014