Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms
Ohshima, Ichiro, Akiyama, Morito, Kakami, Akira, Tabaru, Tatsuo, Kamohara, Toshihiro, Ooishi, Yasunobu, Noma, HiroakiVolume:
45
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5169
Date:
June, 2006
Fichier:
PDF, 212 KB
english, 2006