Effect of O 2+ and O + on the Growth of B i 2S r 2C a n -1 C u n O y Superconducting Films in RF Magnetron Sputtering
Harada, Kanji, Kishida, Satoru, Matsuoka, Takeru, Maruyama, Takafumi, Tokutaka, Heizo, Fujimura, KikuoVolume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.4297
Date:
August, 1996
Fichier:
PDF, 694 KB
1996
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