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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Micromachining and Microfabrication Process Technology XVIII - Method of creating microscale prototypes using SLM based holographic lithography
Lawson, Joseph L., Jenness, Nathan, Wilson, Scott, Clark, Robert L., Maher, Mary Ann, Resnick, Paul J.Volume:
8612
Année:
2013
Langue:
english
DOI:
10.1117/12.2003164
Fichier:
PDF, 373 KB
english, 2013