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Picosecond Pulse Laser Microstructuring of silicon
Ming, Zhao, Gang, Yin, Jing-Tao, Zhu, Li, ZhaoVolume:
20
Langue:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/20/10/338
Date:
October, 2003
Fichier:
PDF, 229 KB
english, 2003