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Analysis of the sidewall films formed during Si trench etching with photoresist mask in Cl2/HBr-based plasma
Sang-Do Lee, So-Young Nam, Jae-Hee Ha, Jin-Won ParkVolume:
165
Année:
2000
Langue:
english
Pages:
8
DOI:
10.1016/s0169-4332(99)00595-4
Fichier:
PDF, 1.68 MB
english, 2000