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Solid-phase crystallization and dopant activation of amorphous silicon films by pulsed rapid thermal annealing
Yongqian Wang, Xianbo Liao, Zhixun Ma, Guozhen Yue, Hongwei Diao, Jie He, Guanglin Kong, Yuwen Zhao, Zhongming Li, Feng YunVolume:
135
Année:
1998
Langue:
english
Pages:
4
DOI:
10.1016/s0169-4332(98)00230-x
Fichier:
PDF, 75 KB
english, 1998