The effect of precleaning treatments on the formation of Ti silicide
Sang-Chul Jung, Ji-Soo Park, Yeo-Boon Yoon, Jae-Sung Roh, Jae-Jeong KimVolume:
125
Année:
1998
Langue:
english
Pages:
6
DOI:
10.1016/s0169-4332(97)00408-x
Fichier:
PDF, 472 KB
english, 1998