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A new theoretical model for the description of the degradation of silicon nitride films under high temperature annealing
G.V. Gadiyak, V.G. Gadiyak, M.L. Kosinova, E.G. SalmanVolume:
113-114
Année:
1997
Langue:
english
Pages:
5
DOI:
10.1016/s0169-4332(96)00824-0
Fichier:
PDF, 365 KB
english, 1997