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Contact resistivity between tungsten and impurity (P and B)-doped Si1−x−yGexCy epitaxial layer
Jintae Noh, Masao Sakuraba, Junichi Murota, Shigeaki Zaima, Yukio YasudaVolume:
212-213
Année:
2003
Langue:
english
Pages:
5
DOI:
10.1016/s0169-4332(03)00067-9
Fichier:
PDF, 165 KB
english, 2003