Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials
Koji Sugioka, Toshimitsu Akane, Kotaro Obata, Koichi Toyoda, Katsumi MidorikawaVolume:
197-198
Année:
2002
Langue:
english
Pages:
8
DOI:
10.1016/s0169-4332(02)00465-8
Fichier:
PDF, 391 KB
english, 2002