Development of PZT sputtering method for mass-production
Masuda, T., Miyaguchi, Y., Tanimura, M., Nishioka, Y., Suu, K., Tani, N.Volume:
169-170
Langue:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00716-9
Date:
January, 2001
Fichier:
PDF, 192 KB
english, 2001