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SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Emerging Lithographic Technologies VI - Impact of EUV light scatter on CD control as a result of mask density changes
Krautschik, Christof G., Ito, Masaaki, Nishiyama, Iwao, Okazaki, Shinji, Engelstad, Roxann L.Volume:
4688
Année:
2002
Langue:
english
DOI:
10.1117/12.472302
Fichier:
PDF, 300 KB
english, 2002