Fabrication of Whitely Luminescent Silicon-Rich Nitride Films by Atmospheric Pressure Chemical Vapor Deposition
Lin, Chia-Hung, Uen, Wu-Yih, Huang, Yen-Chin, Li, Zhen-Yu, Liao, Sen-Mao, Yang, Tsun-Neng, Lan, Shan-Ming, Huang, Yu-HsiangVolume:
47
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.4696
Date:
June, 2008
Fichier:
PDF, 310 KB
english, 2008