Study of $a$-Plane GaN Epitaxial Lateral Overgrowth Using Carbonized Photoresist Mask on $r$-Plane Sapphire
Jang, Samseok, Lee, Dohan, Kwon, Jun-hyuck, Kim, Sang-il, Yim, So young, Lee, Jaesang, Park, Ji Hun, Byun, DongjinVolume:
51
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.115501
Date:
October, 2012
Fichier:
PDF, 144 KB
english, 2012