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Influence of Deposition Conditions on Properties of Hydrogenated Amorphous Silicon Prepared by RF Glow Discharge
Nishikawa, Satoshi, Kakinuma, Hiroaki, Watanabe, Tsukasa, Nihei, KojiVolume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.639
Date:
June, 1985
Fichier:
PDF, 1.03 MB
1985