Characterization of Surface Conductive Diamond Layer Grown by Microwave Plasma Chemical Vapor Deposition
Mori, Yusuke, Show, Yoshiyuki, Deguchi, Masahiro, Yagi, Hiromasa, Yagyu, Hiroyuki, Eimori, Nobuhiro, Okada, Takashi, Hatta, Akimitsu, Nishimura, Kazuhito, Kitabatake, Makoto, Ito, Toshimichi, Hirao, TVolume:
32
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L987
Date:
July, 1993
Fichier:
PDF, 224 KB
english, 1993