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A micro flow sensor from a polymer for gases and liquids
Ahrens, R, Schlote-Holubek, KVolume:
19
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/7/074006
Date:
July, 2009
Fichier:
PDF, 433 KB
english, 2009