Production of Volume Wave Plasma with Internally Mounted Cylindrical Planar Microwave Launcher and Two-Dimensional Field Analysis Using Finite Difference Time Domain Method
Ogino, Akihisa, Naito, Katsutoshi, Terashita, Fumie, Nanko, Shohei, Nagatsu, MasaakiVolume:
44
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.L352
Date:
February, 2005
Fichier:
PDF, 406 KB
english, 2005