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Non-contact Deformable Mirror Actuator for Spherical Aberration Compensation
Hashizume, Jiro, Ide, Tatsuro, Kanamaru, Masatoshi, Mukoh, Masaki, Watanabe, Koichi, Yamauchi, YoshiakiVolume:
50
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.09MA02
Date:
September, 2011
Fichier:
PDF, 911 KB
english, 2011