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Control of polystyrene- block -poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing
Jacobs, Alan G., Jung, Byungki, Jiang, Jing, Ober, Christopher K., Thompson, Michael O.Volume:
14
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.14.3.031205
Date:
July, 2015
Fichier:
PDF, 1.79 MB
english, 2015