
Compositional analysis of graded Al[sub x]Ga[sub (1−x)]As layers by x-ray energy dispersive spectrometry
K. Mahalingam, R. Wheeler, W. T. Taferner, K. G. Eyink, S. T. Fenstermaker, J. S. SolomonAnnée:
2004
Langue:
english
DOI:
10.1116/1.1740767
Fichier:
PDF, 644 KB
english, 2004