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Vinyl ethers in ultraviolet curable formulations for step and flash imprint lithography
E. K. Kim, N. A. Stacey, B. J. Smith, M. D. Dickey, S. C. Johnson, B. C. Trinque, C. G. WillsonAnnée:
2004
Langue:
english
DOI:
10.1116/1.1635849
Fichier:
PDF, 739 KB
english, 2004