SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Reliability, Testing, and Characterization of MEMS/MOEMS II - New getter configuration at wafer level for assuring long term stability of MEMs
Moraja, Marco, Amiotti, Marco, Kullberg, Richard C., Ramesham, Rajeshuni, Tanner, Danelle M.Volume:
4980
Année:
2003
Langue:
english
DOI:
10.1117/12.472718
Fichier:
PDF, 508 KB
english, 2003