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[ACM Press the International Conference - San Jose, California (2012.11.05-2012.11.08)] Proceedings of the International Conference on Computer-Aided Design - ICCAD '12 - Layout small-angle rotation and shift for EUV defect mitigation
Zhang, Hongbo, Du, Yuelin, Wong, Martin D. F., Deng, Yunfei, Mangat, PawitterAnnée:
2012
Langue:
english
DOI:
10.1145/2429384.2429394
Fichier:
PDF, 713 KB
english, 2012