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[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS growth mechanism
Ming-Che Yang,, Shich, J., Tsung-Shine Ko,, Hsuen-Li Chen,, Tich-Chi Chu,Année:
2004
Langue:
english
DOI:
10.1109/imnc.2004.245649
Fichier:
PDF, 251 KB
english, 2004