Instability in micromachined curved thermal bimorph structures
Hsu, Chenpeng, Hsu, WensyangVolume:
13
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/6/319
Date:
November, 2003
Fichier:
PDF, 527 KB
english, 2003