Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface
Denpoh, Kazuki, Shirafuji, TatsuruVolume:
50
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.50.036001
Date:
March, 2011
Fichier:
PDF, 420 KB
english, 2011