AIP Conference Proceedings [AIP Publishing LLC 7TH INTERNATIONAL CONFERENCE ON LOW DIMENSIONAL STRUCTURES AND DEVICES: (LDSD 2011) - Telchac, Mexico (22–27 May 2011)] - Hydrogen and temperature dependence of d.c. pulsed magnetron sputtered amorphous silicon
Schäfer, Philipp, Nobis, Frank, Gordan, Ovidiu D., Kupfer, Hartmut, Richter, Frank, Zahn, Dietrich R. T.Année:
2014
Langue:
english
DOI:
10.1063/1.4878273
Fichier:
PDF, 426 KB
english, 2014
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