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Atomic imaging of the monolayer nucleation and unpinning of a compound semiconductor surface during atomic layer deposition
Clemens, Jonathon B., Chagarov, Evgueni A., Holland, Martin, Droopad, Ravi, Shen, Jian, Kummel, Andrew C.Volume:
133
Année:
2010
Langue:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.3487737
Fichier:
PDF, 1.49 MB
english, 2010