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[AIP LASER AND PLASMA APPLICATIONS IN MATERIALS SCIENCE: First International Conference on Laser Plasma Applications in Materials Science—LAPAMS’08 - Algiers (Algeria) (23–26 June 2008)] AIP Conference Proceedings - Electrical And OES Diagnostics Of A Magnetized RF Discharge In CH[sub 4] Created By A Multihole Cathode Used For a-C:H Deposition
Djerourou, S., Henda, K., Ouchabane, M., Amara, El-Hachemi, Boudjemai, Saïd, Doumaz, DjamilaVolume:
1047
Année:
2008
Langue:
english
DOI:
10.1063/1.2999943
Fichier:
PDF, 337 KB
english, 2008