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[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Seventh International Workshop on Stress-Induced Phenomena in Metallization - Austin, Texas (USA) (14-16 June 2004)] AIP Conference Proceedings - Examination of Critical Length Effect in Copper Interconnects With Oxide and Low-k Dielectrics
Thrasher, StacyeVolume:
741
Année:
2004
Langue:
english
DOI:
10.1063/1.1845846
Fichier:
PDF, 600 KB
english, 2004