Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure
Sorokin, B. P., Kvashnin, G. M., Telichko, A. V., Gordeev, G. I., Burkov, S. I., Blank, V. D.Volume:
61
Langue:
english
Journal:
Acoustical Physics
DOI:
10.1134/S106377101503015X
Date:
July, 2015
Fichier:
PDF, 2.24 MB
english, 2015